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鍥?/span>3 澶?/span>LM娑?/span>婊?/span>鐨?/span>騫?/span>琛?/span>椹?/span>鍔?/span>

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鍥?/span>4 LM娑?/span>婊?/span>杞?/span>杈?/span>涓?/span>鍏?/span>鎺?/span>緇?/span>鐢?/span>鍣?/span>

璇?/span>宸?/span>浣?/span>榪?/span>灞?/span>紺?/span>浜?/span>鐢?/span>澶?/span>涓?/span>LM娑?/span>婊?/span>緇?/span>鎴?/span>鐨?/span>杞?/span>杞?/span>椹?/span>鍔?/span>鐨?/span>杞?/span>杈?/span>錛?/span>濡?/span>鍥?/span>4a-b鎵紺?/span>銆?/span>榪?/span>琛?/span>鏄?/span>涓涓?/span>嬋鍏?/span>鍏?/span>鏂?/span>涔?/span>鍙?/span>浠?/span>寮?/span>瀵?/span>澶?/span>涓?/span>娑?/span>婊?/span>涓?/span>鍏?/span>鏈?/span>涓瀹?/span>鐨?/span>璐?/span>杞?/span>鑳?/span>鍔?/span>銆?/span>涓?/span>浜?/span>鏇?/span>濂?/span>鍦?/span>寮鍙?/span>鍏?/span>鎺?/span>LM娑?/span>婊?/span>鐨?/span>搴?/span>鐢?/span>錛?/span>璇?/span>宸?/span>浣?/span>榪?/span>璁?/span>璁?/span>浜?/span>涓涓?/span>鍏?/span>鎺?/span>緇?/span>鐢?/span>鍣?/span>鏉?/span>婕?/span>紺?/span>瀵?/span>鐢?/span>璺?/span>鐨?/span>榪?/span>紼?/span>鎺?/span>鍒?/span>錛?/span>濡?/span>鍥?/span>4c-d鎵紺?/span>銆?/span>


鍥?/span>5 LM娑?/span>婊?/span>鐨?/span>鍙?/span>鎺?/span>鍒?/span>瑁?/span>涓?/span>鍚?/span>騫?/span>


LM娑?/span>婊?/span>鐨?/span>褰?/span>鐘?/span>鏄?/span>琛?/span>闈?/span>寮?/span>鍔?/span>鍜?/span>閲?/span>鍔?/span>緇?/span>鍚?/span>浣?/span>鐢?/span>鐨?/span>緇?/span>鏋?/span>錛?/span>鍥?/span>姝?/span>錛?/span>鍙?/span>浠?/span>閫?/span>榪?/span>鐢?/span>鍖?/span>瀛?/span>鏀?/span>鍙?/span>LM娑?/span>婊?/span>鐨?/span>琛?/span>闈?/span>寮?/span>鍔?/span>鏉?/span>璇?/span>瀵?/span>鍙?/span>褰?/span>鐢?/span>鑷?/span>鍒?/span>瑁?/span>銆?/span>鐮?/span>絀?/span>鑰?/span>浣?/span>鐢?/span>鏂?/span>鍏?/span>灝?/span>鐨?/span>嬋鍏?/span>鏉?/span>鐓?/span>灝?/span>LM娑?/span>婊?/span>涓?/span>鏂?/span>鐨?/span>鍏?/span>鐢?/span>鏅?/span>浣?/span>綆?/span>嬋媧?/span>鐢?/span>鏋?/span>錛?/span>涔?/span>鍚?/span>LM娑?/span>婊?/span>灝?/span>浼?/span>鍙?/span>鐢?/span>鐢?/span>鍖?/span>瀛?/span>姘?/span>鍖?/span>鍙?/span>搴?/span>鍙?/span>鐢?/span>鍙?/span>褰?/span>銆?/span>鏈?/span>瓚?/span>鐨?/span>鏄?/span>錛?/span>涓閮?/span>鍒?/span>LM娑?/span>婊?/span>鍊?/span>鍚?/span>浜?/span>浠?/span>鎺?/span>瑙?/span>鐢?/span>鏋?/span>鐨?/span>浣?/span>緗?/span>嫻?/span>璧?/span>錛?/span>騫?/span>鏈緇?/span>鍒?/span>瑁?/span>褰?/span>鎴?/span>涓?/span>涓?/span>娑?/span>婊?/span>錛?/span>濡?/span>鍥?/span>5a鎵紺?/span>銆?/span>姝?/span>澶?/span>錛?/span>鍦?/span>鐩?/span>瀵?/span>杈?/span>楂?/span>鐨?/span>閫?/span>搴?/span>涓?/span>錛?/span>涓?/span>涓?/span>娑?/span>婊?/span>鍦?/span>鎯?/span>鎬?/span>鐨?/span>浣?/span>鐢?/span>涓?/span>鍏?/span>鏈?/span>琛?/span>闈?/span>寮?/span>鍔?/span>鍚?/span>騫?/span>鎴?/span>涓涓?/span>澶?/span>鐨?/span>LM娑?/span>婊?/span>錛?/span>濡?/span>鍥?/span>5b鎵紺?/span>銆?/span>

鎬?/span>涔?/span>錛?/span>璇?/span>欏?/span>宸?/span>浣?/span>灞?/span>紺?/span>浜?/span>涓縐?/span>澶?/span>鍔?/span>鑳?/span>銆?/span>閫?/span>鐢?/span>鐨?/span>鍏?/span>璇?/span>瀵?/span>LM娑?/span>婊?/span>鎿?/span>綰?/span>鏂?/span>妗?/span>銆?/span>璇?/span>鏂?/span>妗?/span>鍙?/span>浠?/span>寰?/span>瀹?/span>鏄?/span>鍦?/span>璇?/span>瀵?/span>澶?/span>娑?/span>婊?/span>騫?/span>鍙?/span>椹?/span>鍔?/span>銆?/span>鍒?/span>瑁?/span>鍜?/span>鍚?/span>騫?/span>錛?/span>涓?/span>鑳?/span>澶?/span>鍙?/span>鏈澶?/span>闄?/span>搴?/span>鍦?/span>鍑?/span>灝?/span>婊?/span>鍚?/span>騫?/span>閬?/span>鍏?/span>鏀?/span>鍙?/span>LM鐨?/span>鍐?/span>鍦?/span>鐗?/span>鎬?/span>銆?/span>榪?/span>縐?/span>鐢?/span>浜?/span>鎿?/span>綰?/span>LM娑?/span>婊?/span>鐨?/span>鍏?/span>璇?/span>瀵?/span>鎺?/span>鍒?/span>鏂?/span>娉?/span>涓?/span>鍦?/span>MEMS銆?/span>鐜?/span>鍦?/span>鍙?/span>緙?/span>紼?/span>鏈?/span>鍣?/span>浜?/span>鍜?/span>鍩?/span>浜?/span>娑?/span>婊?/span>鐨?/span>娑?/span>浣?/span>鍗?/span>浣?/span>鏈?/span>鍣?/span>浜?/span>棰?/span>鍩?/span>鐨?/span>寮鍒?/span>鎬?/span>鏈?/span>鏉?/span>鐮?/span>絀?/span>鎻?/span>渚?/span>浜?/span>鏂?/span>鐨?/span>鏂?/span>鍚?/span>鍜?/span>鎶鏈?/span>閫?/span>寰?/span>銆?/span> 涓?/span>鍥?/span>縐?/span>瀛?/span>鎶鏈?/span>澶?/span>瀛?/span>鍗?/span>澹?/span>鐮?/span>絀?/span>鐢?/span>浠?/span>瀹?/span>娉?/span>錛?/span>涓?/span>鍥?/span>縐?/span>瀛?/span>鎶鏈?/span>澶?/span>瀛?/span>鐗?/span>浠?/span>鍓?/span>鐮?/span>絀?/span>鍛?/span>閲?/span>铏?/span>涓?/span>璁?/span>鏂?/span>鍏?/span>鍚?/span>絎?/span>涓浣?/span>鑰?/span>錛?/span>涓?/span>鍥?/span>縐?/span>瀛?/span>鎶鏈?/span>澶?/span>瀛?/span>寮?/span>涓?/span>姝?/span>鏁?/span>鎺?/span>錛?/span>鑻?/span>鍥?/span>浼?/span>鏄?/span>緲?/span>澶?/span>瀛?/span>鍞?/span>璇?/span>鏉?/span>鍗?/span>澹?/span>錛?/span>浠?/span>鍙?/span>鑻?/span>宸?/span>澶?/span>瀛?/span>鏉?/span>鐩?/span>楣?/span>鏁?/span>鎺?/span>涓?/span>鍏?/span>鍚?/span>閫?/span>璁?/span>浣?/span>鑰?/span>銆?/span>


浣?/span>鑰?/span>綆浠?/span>


鏈?/span>鏂?/span>鍏?/span>鍚?/span>絎?/span>涓浣?/span>鑰?/span>浠?/span>瀹?/span>娉?/span>錛?/span>浜?/span>2018騫?/span>姣?/span>涓?/span>浜?/span>鍚?/span>鑲?/span>宸?/span>涓?/span>澶?/span>瀛?/span>錛?/span>HFUT錛?/span>,鑾?/span>宸?/span>瀛?/span>瀛?/span>澹?/span>瀛?/span>浣?/span>銆?/span>鐜?/span>浜?/span>涓?/span>鍥?/span>縐?/span>瀛?/span>鎶鏈?/span>澶?/span>瀛?/span>寮?/span>涓?/span>姝?/span>鏁?/span>鎺?/span>鎸?/span>瀵?/span>涓?/span>鏀?/span>璇?/span>鍗?/span>澹?/span>瀛?/span>浣?/span>銆?/span>鍏?/span>鐮?/span>絀?/span>鏂?/span>鍚?/span>鍖?/span>鎷?/span>娑?/span>鎬?/span>閲?/span>灞?/span>鍙?/span>鍩?/span>浜?/span>SMA鏌?/span>鎬?/span>鏈?/span>鍣?/span>浜?/span>鐨?/span>寮鍙?/span>銆?/span>



鏈?/span>鏂?/span>鍏?/span>鍚?/span>絎?/span>涓浣?/span>鑰?/span>閲?/span>铏?/span>錛?/span>鐜?/span>浠?/span>涓?/span>鍥?/span>縐?/span>瀛?/span>鎶鏈?/span>澶?/span>瀛?/span>綺?/span>瀵?/span>鏈?/span>姊?/span>涓?/span>綺?/span>瀵?/span>浠?/span>鍣?/span>緋?/span>鐗?/span>浠?/span>鍓?/span>鐮?/span>絀?/span>鍛?/span>銆?/span>涓?/span>瑕?/span>浠?/span>浜?/span>鏅?/span>鑳?/span>鏉?/span>鏂?/span>銆?/span>浠?/span>鐢?/span>鏈?/span>鍣?/span>浜?/span>銆?/span>浠?/span>鍙?/span>鏌?/span>鎬?/span>鏈?/span>鍣?/span>浜?/span>寤?/span>妯?/span>涓?/span>鎺?/span>鍒?/span>鏂?/span>闈?/span>鐨?/span>鐮?/span>絀?/span>錛?/span> 2016騫?/span>鑷?/span>浠?/span>鍦?/span>鏅?/span>鑳?/span>鏉?/span>鏂?/span>涓?/span>浠?/span>鐢?/span>鏈?/span>鍣?/span>浜?/span>棰?/span>鍩?/span>鍙?/span>琛?/span>SCI涓浣?/span>/閫?/span>璁?/span>璁?/span>鏂?/span>9綃?/span>錛?/span>涓?/span>鎸?/span>鍥?/span>鑷?/span>鐒?/span>闈?/span>騫?/span>鍩?/span>閲?/span>1欏?/span>銆?/span>瀹?/span>寰?/span>鐪?/span>鑷?/span>鐒?/span>鍩?/span>閲?/span>閲?/span>鐐?/span>欏?/span>鐩?/span>1欏?/span>鍜?/span>瀹?/span>寰?/span>鐪?/span>閲?/span>鐐?/span>鐮?/span>鍙?/span>欏?/span>鐩?/span>1欏?/span>


鐩?/strong>鍏?/strong>閾?/strong>鎺?/strong>

https://pubs.rsc.org/en/content/articlelanding/2021/mh/d1mh00647a

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